JPH0267219U - - Google Patents

Info

Publication number
JPH0267219U
JPH0267219U JP14687388U JP14687388U JPH0267219U JP H0267219 U JPH0267219 U JP H0267219U JP 14687388 U JP14687388 U JP 14687388U JP 14687388 U JP14687388 U JP 14687388U JP H0267219 U JPH0267219 U JP H0267219U
Authority
JP
Japan
Prior art keywords
grating
light
scale
receiving element
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14687388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0617045Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988146873U priority Critical patent/JPH0617045Y2/ja
Publication of JPH0267219U publication Critical patent/JPH0267219U/ja
Application granted granted Critical
Publication of JPH0617045Y2 publication Critical patent/JPH0617045Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP1988146873U 1988-11-10 1988-11-10 光学式変位検出器 Expired - Lifetime JPH0617045Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988146873U JPH0617045Y2 (ja) 1988-11-10 1988-11-10 光学式変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988146873U JPH0617045Y2 (ja) 1988-11-10 1988-11-10 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH0267219U true JPH0267219U (en]) 1990-05-22
JPH0617045Y2 JPH0617045Y2 (ja) 1994-05-02

Family

ID=31416762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988146873U Expired - Lifetime JPH0617045Y2 (ja) 1988-11-10 1988-11-10 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH0617045Y2 (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006008883A1 (ja) * 2004-07-22 2006-01-26 Kabushiki Kaisha Yaskawa Denki 反射形光学式検出器
JP2007183251A (ja) * 2005-12-06 2007-07-19 Mitsutoyo Corp 光電式エンコーダ
JP2012159518A (ja) * 2012-05-28 2012-08-23 Olympus Corp 反射型光学式エンコーダー

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62150118A (ja) * 1985-12-25 1987-07-04 Mitsutoyo Mfg Corp 光学式変位検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62150118A (ja) * 1985-12-25 1987-07-04 Mitsutoyo Mfg Corp 光学式変位検出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006008883A1 (ja) * 2004-07-22 2006-01-26 Kabushiki Kaisha Yaskawa Denki 反射形光学式検出器
JP2007183251A (ja) * 2005-12-06 2007-07-19 Mitsutoyo Corp 光電式エンコーダ
JP2012159518A (ja) * 2012-05-28 2012-08-23 Olympus Corp 反射型光学式エンコーダー

Also Published As

Publication number Publication date
JPH0617045Y2 (ja) 1994-05-02

Similar Documents

Publication Publication Date Title
JPH01180615U (en])
JP3210111B2 (ja) 変位検出装置
US5559600A (en) Apparatus for detecting relative movement
KR850001422A (ko) 변위 측정기 및 그 측정법
US5742391A (en) Optical type sensor for use as an optical measuring head or optical pickup
JPH0267219U (en])
JP2005526951A5 (en])
JPH0175817U (en])
JPH0330819U (en])
JPH05647B2 (en])
JPH06137899A (ja) 光学式リニアエンコーダ
DE3679606D1 (de) Positionsmessvorrichtung mit optischen gittern.
JP2544237Y2 (ja) ホトインタラプタ
JPS63217222A (ja) 光電式変位検出装置
JPH01112416U (en])
JPS60218616A (ja) 密着イメ−ジセンサ−
TW345614B (en) Diffractive grating linear optical encoders with high tolerance to grating defects and misalignment
JPH05340767A (ja) 光学式変位検出器
SU1265467A1 (ru) Устройство дл измерени пространственного положени объекта
JPH04136716A (ja) 光学式エンコーダ
JPH0215159Y2 (en])
JPH06258100A (ja) アブソリュートエンコーダ
JPH06213682A (ja) アブソリュートエンコーダ
JPS63170711U (en])
JPH03130583U (en])